q=IEEE%2FSIMI+International+Semiconductor+Manufacturing+Science+Symposium%281991%3ABurlingame&searchType=standard&isFacet=true&view=standard&searchWay=author&rows=10&sortWay=score&sortOrder=desc&curlibcode=XT&searchWay0=marc&logical0=AND
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IEEE/SIMI International Semiconductor Manufacturing Science Symposium(1991:Burlingame